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基于X射线相衬成像技术的光栅品质无损检测（英文）
  • ISSN号：0253-2778
  • 期刊名称：《中国科学技术大学学报》
  • 时间：0
  • 分类：O434.19[机械工程—光学工程;理学—光学;理学—物理] TN25[电子电信—物理电子学]
  • 作者机构：中国科学技术大学国家同步辐射实验室
  • 相关基金：Supported by the Major State Basic Research Development Program(2012CB825800);the Science Fund for Creative Research Groups(11321503);the Knowledge Innovation Program of the Chinese Academy of Sciences(KJCX2-YWN42);the National Natural Science Foundation of China(11179004,10979055,11205189,and 11205157);the Fundamental Research Funds for the Central Universities(WK2310000021)
作者： 张灿, 王圣浩, 韩华杰, 杨萌, 邵其刚, 胡仁芳, 高昆, 刘刚
关键词： X射线相衬成像, 无损检测, 光栅品质, 工业运用
中文摘要：

提出了一种基于X射线光栅像衬成像技术的光栅品质无损检测方法.我们发现利用传统的吸收信号很容易检测到光栅电镀缺陷,而由非均匀紫外曝光导致的光栅缺陷则可以通过相衬信号进行检测.实验结果证明,在一种利用实验室光源同时产生吸收信号和相位信号的大视场实验平台上,X射线相位衬成像技术可以很好地运用到光栅缺陷的快速检测以及其他类似的电刻产品的品质检测上.

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期刊信息
  • 《中国科学技术大学学报》
  • 北大核心期刊（2011版）
  • 主管单位:中国科学院
  • 主办单位:中国科学技术大学
  • 主编：何多慧
  • 地址：安徽省合肥市金寨路96号
  • 邮编：230026
  • 邮箱：JUST@USTC.EDU.CN
  • 电话：0551-63601961 63607694
  • 国际标准刊号：ISSN：0253-2778
  • 国内统一刊号：ISSN：34-1054/N
  • 邮发代号:26-31
  • 获奖情况:
  • 1999年，全国优秀高等学校自然科学学报及教育部优...,2001年，安徽省1999-2001年度优秀科技期刊一等奖,2002年，第三届华东地区优秀期刊奖
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,美国数学评论（网络版）,德国数学文摘,荷兰文摘与引文数据库,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）,中国北大核心期刊（2000版）
  • 被引量:8237