中文摘要：

在电磁场驱动原理的基础上，设计并研制了一种磁能驱动的微型泵。微型泵包括进／出液管、扩散管／喷管、驱动薄膜、腔体、电磁线圈和永磁体。微型泵的整体尺寸约为Ф11mm×4mm，腔室半径为5mm，深2mm。利用正交实验方法，对微型泵的性能进行了测试。在电压为4V、驱动薄膜厚度为6μm、频率为5Hz方波脉冲的最佳实验条件下，微型泵的最大泵送流速约为0．21mL／min。

英文摘要：

The design, fabrication and characterization of electromagnetism driven micropump based on the principle of electromagnetic field are presented. The micropump includes in/out liquid tube, diffuse/nozzle, membrane, chamber, electromagnetism coil and permanent magnet. The dimension of micropump is about Ф 11 mm × 4 mm. The micropump chamber is round with diameter of 5 mm and depth of 2 mm. The function testing of micropump is carried out by using ortbogonality experiment method. The maximum flow rate of the micropump is 0.21 mL/min under 4 V ,5 Hz square wave power supply and 6 μm of membrane.