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Two-dimensional simulation of an electron
  • 期刊名称：Surface Coating Eechnol
  • 时间：0
  • 页码：2000,131,29-33
  • 语言：英文
  • 相关项目：微波ECR等离子体工艺中不稳定性的机理研究
作者： Minghai Liu, Hu xiwei , etal|
同期刊论文项目
微波ECR等离子体工艺中不稳定性的机理研究
期刊论文 7
同项目期刊论文
Simulation on nonlinear behavior in an electron cyclotron resonance plasma
Mirowave absorption in electron cyclotron resonance plasma
Simulation of ion transport in an extended electron cyclotron resonance plasma
ECR等离子体源非线性现象的数值模拟研究
Preliminary Analysis of Hysteresis Phenomenon In Electron Cyclotron Resonance Plasma
Self-consistent simulation of electron cyclotron resonance plasma discharge