中文摘要：

柔性关节因其结构上的优越性已逐步取代传统刚性关节被运用到高频激振领域中．加工误差是一类不可避免的误差，其对柔性铰链工作性能产生了一定的影响．在分析柔性铰链宽度制造误差等5类结构参数误差的基础上，运用Paros J刚度计算公式和SmithST的误差分析方法建立了加工误差模型，并运用有限元方法模拟了柔性铰链在实际工作条件下的受力变形状况，发现不同的加工误差对柔性关节的刚度影响程度不同，其中厚度误差的影响最大，验证了加工误差模型的准确性．

英文摘要：

The flexure joint has been gradually replaced the rigid joint which is applied to the high- frequency device as its structural advantages. Processing error is a kind of inevitable error which has a great impact on the performance of the flexure joint. Based on a detailed analysis of the vari- ous errors of the structural parameters, a processing error model was established using Paros J stiffness calculation formulas and Smith S T error analysis method, the force-deformation state of the flexible hinge was simulated in the actual operating conditions in finite element method, and the accuracy of the processing error model was verified. It is found that different errors have different influence on the stiffness of the compliant joint,among them the width errors have the biggest influence.