中文摘要：

为了准确表征Love波器件的质点位移和色散关系,提出了一种Love波器件三维建模方案。在Love波器件的三维建模中,该方案用有限数量单元去逼近实际Love波器件的真实物理结构和叉指换能器、波导层等实际载荷工况。通过一个压电基片材料为128°YX-LiNbO3,金属叉指换能器为Al电极,波导层材料为ZnO薄膜的Love波器件三维模型实验,验证了该Love波器件建模方案的可行性。实验结果表明,在49～51 MHz的频率范围内,Love波模态声波的频率为49.072 MHz、49.295 MHz、49.607 MHz和50.062 MHz。在这4个频率处Love波仅存在X方向质点位移的变化,Y和Z方向的质点位移都为0。器件的色散关系为随着角频率增大,Love波的速度逐渐减小。

英文摘要：

In order to accurately characterize the particle displacement and the dispersion relationship of the Love wave device,a three-dimensional modeling scheme of Love wave device was proposed. In the scheme of the three-di- mensional modeling,a limited number of units were applied to approximate the real physical structure and the actual load conditions such as inter-digital transducer and waveguide layer. By means of the Love wave device with the 128° YX-LiNbO3 piezoelectric substrate,A1 metal inter-digital transducer, and the ZnO thin film waveguide layer materi- al,the three-dimensional model scheme of the Love wave device could be verified. The experimental results showed that the frequencies of Love modal wave were 49. 072 MHz,49. 295 MHz,49. 607 MHz,50. 062 MHz in the frequen- cy range from 49 MHz to 51 MHz. At these frequencies, the Love waves only had the particle displacement along the X direction, and the particle displacements along the Y direction and Z direction were zero. Furthermore, the dispersion relationship was that the velocities of Love wave would decrease with the increase, of angular frequency.