中文摘要：

非制冷红外探测器具有广阔的军事和民用前景。近年来，出现了一类性能优越的新型双层微测辐射热计型红外探测器。 利用有限元分析方法和光学导纳矩阵法详细研究了两种类型的双层微测辐射热计的主要性能。结果表明，双层微测辐射热计的综合性能优于单层微测辐射热计。其中，双层 S型结构的温升最优，但其力学稳定性较差，难以满足实践需要；双层 U 型结构的温升虽低于双层 S 型结构的温升，但明显优于单层微桥；重要的是，双层 U 型结构在光吸收性能、力学稳定性、器件制造等方面均优于双层 S 型结构。所以，双层 U 型结构的综合性能更优。还设计了一种综合性能更优的改进型双层 U 型结构。

英文摘要：

Uncooled infrared detectors are widely used in both civilian and military applications. Recently, new two-layer microbolometers with improved performance were developed. Finite element analysis and optical admittance matrix calculation were used to study the main properties of such two-layer microbolometers. The simulation results revealed that compared with the conventional one-layer microbolometers, the new two-layers microbolometers exhibit improved performance under the same conditions. In addition, the thermal property of S-type two-layer bolometer is excellent. However, the stability of S-type two-layer bolometer is poor whose structure is very difficult to be fabricated practically. Although the temperature rise for U-type two-layer bolometer is not so good as that for S-type bolometer, the thermal property of U-type two-layer bolometer is significantly better than those for the traditional one-layer bolometers. Particularly, U-type two-layer bolometer exhibits better light absorption, mechanical stability and device manufacturing, compared with those of S-type two-layer microbolometers. Therefore, the optimal integrated properties U-type two-layer bolometer shows is much better. In addition, a new U-type two-layer bolometer with better comprehensive properties was designed.