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Thickness dependence of the optical constants of oxidized copper thin films based on ellipsometry and transmittance
  • ISSN号：1674-1056
  • 期刊名称：《中国物理B：英文版》
  • 时间：0
  • 分类：O484.41[理学—固体物理;理学—物理] P618.13[天文地球—矿床学;天文地球—地质学]
  • 作者机构：[1]Department of Physics, University of Science and Technology of China, Hefei 230026, China, [2]The Center of Physical Experiments, University of Science and Technology of China, Hefei 230026, China
  • 相关基金：Project supported by the National Natural Science Foundation of China （Grant Nos. 11074232, 10874160, and 21002097） and the National Basic Research Program of China （Grant Nos. 2011CB932801 and 2012CB933702）.
作者： Gong Jun-Bo[1], Dong Wei-Le[1], Dai Ru-Cheng[1], Wang Zhong-Ping[2], Zhang Zeng-Ming[2], Ding Ze-Jun[2]
关键词： 有效厚度, 光学常数, 铜薄膜, 光透射, 氧化, 分光光度计, 椭圆, 基础, thin film, optical constants, thickness, copper
中文摘要：

Corresponding author. E-mail： zzm@ustc.edu.cn

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期刊信息
  • 《中国物理B：英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国物理学会和中国科学院物理研究所
  • 主编：欧阳钟灿
  • 地址：北京 中关村 中国科学院物理研究所内
  • 邮编：100080
  • 邮箱：
  • 电话：010-82649026 82649519
  • 国际标准刊号：ISSN：1674-1056
  • 国内统一刊号：ISSN：11-5639/O4
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 被引量:406