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氢等离子体辅助原子层沉积铜薄膜的研究
  • 所属机构名称：北京印刷学院
  • 会议名称：第十七届全国等离子体科学技术会议成都
  • 时间：2015.8.19
  • 成果类型：会议
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
同会议论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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