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Mode transitions of a Helicon Plasma Source in small Magnetic Fields
  • 所属机构名称：北京印刷学院
  • 会议名称：The 9th Asian-European International Conference on Plasma Surface Engineering
  • 时间：2013.8.31
  • 成果类型：会议
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
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磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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