Influence of the strain of AlN buffeg layer on the strain evolution of GaN epilayer grown on 3-in 6H
- 所属机构名称:中国电子科技集团公司第十三研究所
- 会议名称:"The 2011 International Conference on materials and Products Manufacturing Technology (MPMT 201
- 成果类型:会议
- 相关项目:InAlN/GaN无应变新异质结场效应晶体管材料研究