中文摘要：

针对半导体晶圆生产线调度，提出了由用于日生产计划的调度方案对比的短期性能指标，和用于每日投料计划的、实施分析的长期性能指标组成的半导体晶圆生产制造系统的性能指标体系．其中，短期性能指标分为与产品有关的在制品值、移动步数和移动速率，以及与设备有关的设备利用率、负载程度、排队队长和瓶颈率；长期性能指标主要包括产品的加工周期、流程参数和生产率．在此基础上，设计并实现了半导体晶圆生产线调度性能评价系统，以指导半导体车间的实际生产．该系统已经在工厂中得到应用．

英文摘要：

A performance evaluation system, which consists of short-term performance indices and longterm performance indices, is presented for scheduling semiconductor wafer production line. The shortterm performance indices aim to evaluate the daily production plans, and include two types, i. e. product-related performances indices （such as Work In Process, movement and step） and equipment-related performances indices （such as the rate of utilize of equipment, load, queue and the rate of bottleneck）. The longterm performance indices help to analyze the daily order release plan, and are composed of average cycle time and productive rate. A Performance-Evaluation System for scheduling semiconductor wafer production line was then designed and implemented to guide the actual production in semiconductor wafer shop. This developed sub-system has been well applied in factories.