中文摘要：

利用高温共烧陶瓷（HTCC）技术中的叠片、高温烧结工艺获得了白色致密的氧化铝陶瓷基板,并结合丝网印刷、后烧工艺在该基板上形成了平面螺旋电感图形,制备了一种陶瓷基平面螺旋电感,并在室温至800℃的温度范围内对其进行了高温性能测试。测试结果表明,当测试频率低于电感的自谐振频率时,电感的特性参数如电感、等效串联电阻以及Q值随温度、频率均发生了不同程度的改变。电感的自谐振频率对温度的平均变化量为-1.97kHz/℃,Q值最高为10.5,最佳工作频段为16-27 MHz。它是一种可应用于高温恶劣环境中的无源元件。

英文摘要：

A white dense alumina ceramic substrate was obtained by the lamination and high temperature sintering process of high temperature co-fired ceramic（HTCC） technology, and a pattern of planar spiral inductor was formed on the substrate with screen printing and post-sintering process. The ceramic-based planar spiral inductor was fabricated, and the measurement of its high temperature performance was achieved under the temperature from room temperature to 800 ℃. The results show that when the test frequency is less than the self-resonant frequency of the inductor, the characteristic parameters such as the inductance, equivalent series resistance and quality factor（Q） change with temperature and frequency in different degrees. The average change of the self-resonant frequency of the inductor to temperature is -1.97 kHz /℃, Q is up to 10.5, and the best working frequency band is 16-27 MHz. It is a passive component which can be applied in high temperature harsh environment.