欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
提出一种新颖红外传感器，这种传感器采用悬浮吸收层的双层结构的优势，来实现相对小尺寸下的高探测性能。双层结构采用2种牺牲层材料，分别为聚酰亚胺牺牲层和预埋在热偶条和沉底之间的多晶硅材料。仿真结果证明了该种结构的探测率、响应率和响应时间分别达到2.85×10^8 cm Hz（1/2）/W、1800 V/W和6 ms。本文给出了该种热电堆红外探测器高度兼容于CMOS工艺的制备流程，使器件的高效量产和低成本生产成为可能。
英文摘要：
A novel infrared （ IR ） detector is designed and presented. The detector takes advantage of suspended absorber-thermopile bi-layers to achieve high performance with a relatively small size. The bi-layers are realized by using two separated sacrificial layers, which include a Poly-Si film beneath the thermopiles and a polyimide deposition over the thermopiles. Simulation results demonstrate that the detectivity,responsibility and response time of the IR detectors can reach 2. 85×10^8 cmHz（1/2）/W,1 800 V/W and 6 ms,respectively. Moreover,the fabrication of the IR detector is highly compatible with standard CMOS process, which as a result, makes the high-yield and low-cost production possible.
同期刊论文项目
同项目期刊论文
期刊信息
位置：