中文摘要：

提出了一种7通道并行测试的MEMS加速度计自动化测试分析系统，该系统高度集成多种功能，实现了加速度计高效率测试与分析。在常规测试系统基础上，该系统通过上层应用程序Labview实现了单一人机交互终端对振动台、高低温交变湿热试验箱和供电电源等设备的控制。灵敏度、线性度、重复性、滞回特性、温度特性、频响特性等参数指标，能够在控制终端通过分析测试数据同时获得，并以报表形式输出。在一般情况下，传感器测试效率可达50只／h，大大高于传统的非自动化测试系统。经过评估测试，该测试系统还表现出较高的测试精度及稳定性和可靠性，测试误差小于±2．5％。该自动化测试系统为进一步降低MEMS传感器成本，促进其在物联网领域的大规模应用奠定了基础。

英文摘要：

A novel automatic testing and analyzing system with seven channels for MEMS accelerometers was introduced in this article. This system was designed with multi-function and high level of integration based on multi-channel and parallel configuration, leading to high-efficient testing and analyzing. Based on the conventional testing systems, the Labview-based top level application software in this system was used to realize manipulation of the electro-mechanical vibrator, temperature ＆ humidity chamber, the voltage bias and so on. Meanwhile, parameters such as sensitivity, linearity, repeatability, hysteresis behavior, temperature behavior and frequency behavior were able to be measured and exported as reports all in once. Normally, the efficiency of sensor testing could achieve 50 devices/h, much higher than traditional manual systems. Experimental results show that the system is built up with high accuracy, stability and reliability, with the testing error less than ±2.5%. This prototype enables the cost reduction of MEMS sensors, thus the mass application in the domain of internet of things （IOT）.