中文摘要：

无线无源高温压力传感器在高温、高压等恶劣环境中应用日益广泛.其耐高温性能已成为衡量传感器的-项最基本且重要的指标. 利用低温共烧陶瓷LTCC（Low Temperature Co-Fired Ceramic）技术.分别设计和制作了陶瓷基片上电感及电容器件.并进行高温特性测试.通过讨论和分析确定了造成电感和电容随温度变化的原因. 测试结果表明：在100℃-500 ℃温度范围内.电感L基本保持不变.等效串联电阻R 增大了2.7倍.电容C增大了5.3%.从而LC谐振传感器的品质因数Q 减小了72.8%. 该测试及分析对高温环境下基于LC谐振式压力传感器的优化设计具有重要的指导意义.

英文摘要：

The applications of wireless passive pressure sensor in harsh environments,such as high temperature and high pressure,is becoming more and more widely. The high temperature resistant performance has become one of the most basic and important indexes of the sensor. Using low temperature co￣fired ceramic( LTCC) technology,the induc￣tor and capacitor based on ceramic substrate has been designed and fabricated respectively,the high temperature prop￣erties test is also carried out,and the causes of the inductor and capacitor which are varied with temperature,through the discussion and analysis are determined. With the temperature range from 100℃ to 500℃,test results show that inductance L basically remains the same,the resistance R increases by 2. 7 times,the capacitance C increases by 5.3%,thus the quality factor Q decreases by 72.8%. The test and analysis have an important guiding significance for optimization design of the LC resonant pressure sensor in high temperature environment.