中文摘要：

为进一步提升红外气体传感器的性能,提出了一种可实现辐射自增强的多层纳米交叠复合非晶碳薄膜材料应用于红外光源,对材料制备的关键工艺及性能表征进行了深入研究,以期大幅提高光源的辐射效率,降低功耗。采用非平衡磁控溅射工艺制备了含钛的周期性非晶碳复合薄膜,在不同退火条件下进行了方阻及光学吸收率测试表征。结果表明,多层纳米厚度交叠薄膜有效降低了薄膜的应力;氧等离子体表面刻蚀调控工艺实现了高辐射率纳米纤维材料的集成制备;制备的非晶碳纳米复合薄膜在高温800℃退火后呈现出良好的电阻热稳定性,在波长5-6μm内吸收率大于80%,最高接近84%。本工作为该辐射自增强的非晶碳薄膜应用于MEMS红外光源提供了一定的技术支持。

英文摘要：

In order to further improve the performance of the infrared gas sensors, the multi-layer overlapping nanocomposite amorphous carbon thin films with radiation self-enhancement for IR source were presented. The key preparation process and performance characterization of the material were studied to significantly improve the radiation efficiency of sources and reduce power consumption. The periodic amorphous carbon composite thin films containing titanium were prepared by the unbalanced magnetron sputtering process, and the square resistances and optical absorptivity were measured and characterized under different annealing conditions. The results show that the multi-layer overlapping nano-films can effectively reduce the stress of the thin films, and the oxygen plasma surface etching regulation process can realize the integrated prepa- ration of nanofiber materials with high radiance. The prepared amorphous carbon nanocomposite thin films exhibit a good resistance thermal stability after annealing at 800 ℃, and the absorptivity is more than 80% and the maximum absorptivity is close to 84% in the wavelength range of 5- 6 μm. This work provides a certain technical support for the application of radiation self-enhancement amorphous carbon thin films to MEMS IR sources.