中文摘要：

压电驱动因其多样的实现形式和高精度而弓l起广泛关注，但由于压电振子的非线性容性特性使其效率成为进一步商业化的限制。为了提高压电振子的效率，本文研究了超声振子与驱动电路的匹配技术，重点讨论了容性振子的串联电感匹配技术，对电感的作用进行了仿真研究，提出了最小相位匹配原理，实验验证效果良好，该理论适用于压电振子的动态匹配技术。

英文摘要：

As a new driving technology, piezoelectric driving has many considerable advantages and has brought widely-attention. But the application is limited because of its lower efficiency and its non-linearity capacitive vibrator. To improve its efficiency by matching between ultrasonic vibrator and its driving circuit, matching principle with a series-inductance was discussed in some papers, but how to settle the value of series-inductance was unknown. The effects of the series-inductance were simulated and discussed in this paper. Smallest phase matching theory was proposed and good experiments performance was achieved. The theory also applies to dynamic matching technique of piezoelectric vibrators.