介绍了超声行波微流体驱动的圆环模型,借助边界层理论阐述了两种主要的驱动机理:声流驱动和声辐射压驱动。基于有限元分析,讨论了模型固有频率与模型结构参数间的关系。通过谐响应分析,在谐振频率处成功激励出所需的模态,得到幅频响应特性,并与模态分析下的模态幅值进行比较分析,得到其幅值变化趋势。对声固耦合模型进行模态分析和谐响应分析,比较结构模型与耦合模型频率的差别,并对声压和幅值进行了比较分析,为模型的进一步优化设计提供指导。
The paper introduced the ultrasonic traveling wave micro-fluid driving cirque model,and discrussed two kinds of primary driving mechanism based on boundary layer theory-acoustic streaming driving and acoustic radiation driving.The relation was discussed between model's natural frequencies and structural parameters by the Finite Element Analysis(FEA).The anticipated vibration mode was excited successfully at the point of resonance frequency by the harmonic response analysis,the amplitude versus frequency response characteristic was obtained,and the trend of amplitude change was obtained by comparing with the amplitude under model analysis.The frequency difference was compared between the structural model and coupling model and the acoustic pressure and amplitude was analyzed through the analysis of the acoustic-structure coupling model.The result provides a guidance for future optimization design.