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中文摘要：
为了更精确地确定显影速率参数,采用基于遗传算法的最小二乘法对显影速率进行拟合,并与Gauss-Newton迭代法进行了比较.结果显示,基于遗传算法的拟合效果更佳,具有较强的鲁棒性,可以用于显影速率参数的确定.该拟合可以为显影模拟、曝光条件的优化提供更精确的参数.
英文摘要：
The development rate was simulated using a least square method based on the genetic algorithm to accurately determine the parameters for development rate and it was compared with one by the Gauss-New ton iterative method. The results indicate the simulated result by the genetic algorithm method is more accurate than one by the Gauss-Newton iterative method and it has the stronger robust, so it can be used to determine the development rate parameters. This work can provide the precise parameters for development simulation and the optimization of exposure condition.
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