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Phase formation and film morphology of ultrathin Co1-xNixSi2 films
  • ISSN号：0734-2101
  • 期刊名称：Journal of Vacuum Science and Technology A
  • 时间：2012.9
  • 页码：-
  • 相关项目：超薄可控金属硅化物的形成工艺及机理研究
作者： Qiu, Zhijun|Zhang, Zhi-Bin|Wu, Dongping|Zhang, Shi-Li|
同期刊论文项目
超薄可控金属硅化物的形成工艺及机理研究
期刊论文 22 会议论文 4
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