中文摘要：

我们利用混合物理化学气相沉积法（Hybrid physical-chemical vapor deposition简称为HPCVD）在（000l）Al2O3衬底上制备了系列干净的MgB2超薄膜,并通过R-T测量、SEM测量、M-T测量、XRD测量对它们进行了表征,探究了其超导电磁性能和薄膜的生长机制.其中的7.5nm厚的MgB2超薄膜为已报导的蓝宝石衬底上生长的性能最高的超薄膜.

英文摘要：

Ultrathin epitaxial MgB2 superconducting films which are phase-pure and oxygen-free have been synthesized by hybrid physical-chemical vapor deposition（HPCVD） technique.Characterizing the films of R-T,SEM,M-T and XRD,we explored their superconductivity,growth mechanism and magnetic property.The 7.5 nm thick films are the thinnest films deposited on Al2O3 substrate via HPCVD among all reported.