中文摘要：

隧道传感系统是基于量子隧道效应,用以测量纳米级微小测量量的传感装置。其中微位移机构的设计对传感器的整体尺寸、量程、精度等性能具有重要作用。以往关于位移机构优化设计的研究主要是针对单一优化目标或普通多目标优化问题,而实际上机构不仅有多个属性需要优化,而且这些属性还可能具有不同的变量和约束,普通单层数学规划难以准确描述和解决。基于此,对隧道传感系统微位移机构的主从关联优化进行研究。根据传感系统的性能要求,对由压电陶瓷和六连杆柔性铰链机构组成的纳米级微位移机构进行初步设计。在此基础上建立柔性铰链机构空间尺寸和静态性能两个关键属性的优化模型,并构建其公共变量的协调层,形成具有主从结构的双层规划模型。提出一种面向工程背景,基于移动区间响应曲面拟合下层最优值函数的双层规划数值方法。最后对计算结果进行分析。

英文摘要：

Tunneling effect sensing system is a system for the nanoscale measurement.The design of micro-displacement mechanism has great influence on the performance of the system.The past research on the optimization of the micro-displacement mechanism focused on the single-objective or common multi-objective problem,but there are many attributes need to be optimized which may have different variables and constraints and can hardly be described and solved by single level programming.So the leader-follower optimization of the micro-displacement mechanism is developed.According to the performance requirements the preliminary design of the micro-displacement mechanism consisted of PZT and flexible hinge structure is proposed.Then the leader-follower optimization model composed of the two significant attributes（size and static characteristic） and the cooperation level with common variables are constructed.A bi-level programming numerical method for the engineering application named moving space response surface fitting optimum value function method is proposed.Finally the results are analyzed.