中文摘要：

利用射频空心阴极作为放电结构，测试了放电结构在低气压下的发射光谱，并计算了电子温度，分析了不同放电条件对光谱强度及电子温度的影响。研究发现，随着气体流量的增加，氩原子谱线强度和等离子体电子温度呈现出先增加后降低的变化规律，这是由于频繁的碰撞造成的。光谱强度随着射频功率的增加而升高。气体流量低于20mL／min（标准状态）时，随着射频空心阴极放电气压的增加，电子温度呈现先增加后降低的变化趋势；当气体流量高于30mL／min时，电子温度不随着放电气压的变化而变化。低气体流量下的电子温度大于高气体流量下的电子温度。

英文摘要：

The emission characteristics of the argon plasma, generated by a RF hollow cathode discharge at a low pressure, were experimentally studied. The influence of the discharge conditions, such as the gas flow rate, RF power, and pressure, on the electron temperature and optical emission intensity was evaluated. The results included： i）. As the gas flow rate increased, the emission intensity and electron temperature changed in an increase-decrease mode, possibly because of the increasing collision; ii）. The emission intensity increased with an increase of the RF power; iii）. As the pressure increased, at a gas flow rate below 20 mL/min, the electron temperature varied in an increase-decrease mode;but at a gas flow rate above 30 mL/min, an increase of the pressure little affected the electron temperature. We found that a higher electron temperature originated from a lower gas flow rate.