中文摘要：

采用偏压辅助增强热丝CVD法在硬质合金衬底上制备常规金刚石薄膜和超细晶粒金刚石薄膜，在往复式球-盘摩擦磨损试验机上考察金刚石薄膜在干摩擦和水润滑条件下的摩擦磨损性能，分别采用扫描电子显微镜、拉曼光谱仪和能谱仪分析金刚石薄膜的表面形貌特性、结构特征及其摩擦表面残余物质的组成．结果表明，常规金刚石薄膜和超细晶粒金刚石薄膜在水润滑下的摩擦系数分别约为0．25和0．22，超细晶粒金刚石薄膜对偶件的磨损率仅为6．94×10^-6mm^3／（Nm），显示出优异的减摩性能，可作为良好的水润滑摩擦副涂层材料．

英文摘要：

Friction and wear behavior of conventional diamond films and Ultra-fine Grained diamond （UFGD） films were investigated under ambient air and deionized water lubricating environment. Two types of diamond films were deposited on WC-Co （YG6） substrates using hot filament chemical vapor deposition （HFCVD） method and the friction experiments were conducted in a ball-on-plate type reciprocating friction tester where the mating balls were made of ball-bearing steel. Scanning electron microscopy （SEM） and Raman spectrascopy were used to study the characterizations of the as-deposited diamond films. Worn areas on diamond films were investigated using SEM and wear debris was analyzed with EDX. Experimental results demonstrated that the friction coefficient of conventional and UFGD films were 0.25 and 0.22 respectively, and the specific wear rate of the mating ball slid against UFGD film was as low as 6.94×10^-6 mm^3 Nm, which represented wonderful tribological performance of diamond films under water lubricating condition.