中文摘要：

本文使用金刚石磨料作为晶种颗粒,通过热丝化学气相法生长出单晶金刚石颗粒,并且建立三维的有限元模型,利用有限元仿真分析了生长过程中影响金刚石磨料生长速率以及沉积质量的各种因素,如热丝的排列方式,衬底的温度场,以及晶种的分布方式。通过固定在热丝CVD反应腔里的热电偶测量了实际的衬底温度分布,从而验证了仿真结果的正确性。另外,通过改变仿真模型优化了沉积单晶金刚石颗粒的工艺参数,获得适应于合成单晶金刚石颗粒的新技术,为化学气相沉积合成单晶金刚石颗粒奠定了基础,也为高温高压金刚石磨料品级的改进与提高提供了新途径。

英文摘要：

Single crystal diamonds were grown on small diamond abrasive particles which were employed as seed crystals using HFCVD method. The influence of many factors, such as the size and arrangement of hot filaments, the temperature field of substrate and the distribution of small diamond abrasive particles on the growth rate and quality of homoepitaxial single crystal diamonds were analyzed. Three-dimensional finite element models were developed to investigate the temperature field in the CVD reactor which made significant contributions to the growth of single crystal diamonds. Based on the temperature distribution measured by thermocouple fixed in CVD reactor, the simulation was validated and the optimum arrangement of seed crystals was established from the simulation results. Furthermore, the simulation model was altered to optimize the process parameters of HFCVD deposition, and an improved process of depositing single crystal diamonds with high efficiency and great crystal shape was obtained, which laid the foundation of developing a new process of depositing large single crystal diamonds.As while,the CVD homoepitaxial coating recovery suggested a new method to improve the grade of crystal shape by HPHT process.