通过偏压辅助增强热丝化学气相沉积法,采用螺旋形热丝排布方式以及优化的预处理方法和沉积工艺,在硬质合金印刷电路板铣刀的表面沉积了均匀的金刚石薄膜,采用扫描电镜和拉曼光谱研究了金刚石薄膜的表面特征。随后,通过铣削试验研究了金刚石涂层刀具的附着强度和切削性能。试验结果表明,复杂形状金刚石薄膜涂层铣刀既具有附着力强、耐磨性好的特点,同时又具备优异的切削性能,并且其制备无需后续抛光处理就能得到平整光滑的表面,这对于推动金刚石薄膜在复杂形状刀具上的产业化应用具有重要意义。
Diamond films were deposited on the WC-Co PCB milling tools with complicated shape surface using electronically aided hot filament chemical vapor deposition (EAHFCVD). During the deposition, the spiral hot filaments arrangement and novel combine pre-treatment method were adopted. SEM and Raman spectrum were employed to study the characterization of as--deposited diamond-coated milling tools. To evaluate their adhesion strength and cutting performance, milling ex periments were performed. The experimental results show that the as--deposited diamond--coated milling tools are characterized as high adhesion strength, good wear resistance and excellent cutting performance; and also, low surface roughness can be attained without subsequent polishing processes.