中文摘要：

采用偏压增强热丝化学气相沉积法,以硼酸三甲酯为掺杂源,以WC-Co硬质合金刀具为衬底,制备了不同掺硼浓度的金刚石薄膜涂层刀具.通过采用扫描电子显微镜（SEM）、拉曼光谱及压痕测试对涂层刀具的表面形貌、薄膜质量和膜-基附着力进行了研究,分析了硼元素对薄膜质量和刀具性能的影响.研究结果表明：硼掺杂可以有效抑制刀具表层钴的扩散,改变金刚石薄膜的成分;掺硼金刚石薄膜的晶粒取向主要是{111},随着掺硼浓度的增加,金刚石薄膜的晶粒变小,平均晶粒尺寸从10μm下降到2μm;金刚石薄膜的拉曼光谱中心声子线随着掺硼浓度的增加向低频方向漂移,强度降低,且出现多晶石墨峰;涂层的膜-基附着力在硼碳摩尔比B/C=3×10-3时最佳.通过对碳化硅颗粒增强铝基复合材料的切削加工试验表明,在适当的掺硼浓度下金刚石薄膜涂层刀具的切削性能得到了显著改善.

英文摘要：

Diamond thin films doped with different boron concentrations were grown on WC-Co cemented carbide inserts by bias-enhanced hot filament chemical vapor deposition. The surface morphology, quality and adhesive strength of diamond coating films were characterized by the scanning electron microscopy, Raman spectra and Rockwell-C indentation. The effect of boron doping on the films quality and cutting performance were analyzed. The results indicate that the boron doping restrains the diffusion of inserts surface Co, changes the component of diamond films. The surface morphology has predominant { 111} orientation, the average grain size of the diamond films decreases from 10 to 2 μm when the boron concentra- tion increases. Raman spectra and Rockwell-C indentation show that the zone center phonon line at 1 338.88 cm^-1 decreases and downshifts to lower energy as the boron concentration increases. When the boron concentration is 3 × 10^-3 , the stress between the coating and substrate interface will be relaxed and the coating quality and adhesion will be improved. The cutting performance tests of the diamond-coated inserts for SiC reinforced aluminum base composite materials indicate that the lifetime of boron-doped diamond coating inserts prolongs significantly as the boron concentration is appropriate.