叠层型压电陶瓷利用逆压电效应可得到精确的微位移量,用作执行器。基于正交三角放大原理设计了一种微位移放大机构。通过有限元法分析设计放大机构,使其将叠层型压电微位移器的位移量放大。研制了样机,并对其进行静、动态性能实验。实验结果表明,该机构各项指标均达到设计要求,证明了设计理论的正确性。
Using converse piezoelectric effect, piezoelectric stack was used as an actuator to get the precision micro displacement, A micro-displacement amplifying mechanism was presented, which was based on the principles of orthogonal triangle amplification. The amplifier was driven by piezoelectric stack actuators. The displacement of piezoelectric actuators was amplified by the amplifying mechanism, which were analyzed through the finite element method. The prototype was fabricated by machining, and then the experiment and analysis of the dynamics and static characteristics for the prototype were carried out. All design parameters achieved and the design theory also proved its correctness in the experiment.