建立了圆柱定子超声波电机定子的有限元分析模型,给出了输入阻抗的计算方法。以研制的圆柱定子直线超声波电机为研究对象,分析在10kHz~40kHz频率范围内定子的输入阻抗一频率特性。此外介绍一种基于虚拟仪器技术的超声波电机阻抗特性分析仪,并对电机定子阻抗进行了测试。通过实验方法测量得到的定子阻抗特性与理论分析相符。
The finite element analysis (FEA) model of cylindrical stator ultrasonic motor (CSUM) was established in this paper. The computation method of input impedance of CSUM was presented. In the impedance analysis of the cylindrical stator linear ultrasonic motor developed by us, the frequency range was from 10 kHz to 40 kHz. The stator's character of impedence was also surveyed by using impedence characteristic analysis instrument. The experimental results proved the theory analysis.