中文摘要：

以光纤光栅为敏感元件，设计了一种基于钢制等强度悬臂梁结构的高频振动传感器，该传感器由光纤光栅粘贴于等强度悬臂梁的表面而实现。运用材料力学原理对该等强度悬臂梁的共振频率和应变特性进行了推导。采用匹配滤波法解调光信号，并进行了传感探头优化设计，使该传感器实现了温度补偿。在不同环境温度下对任意频率的振动进行了测量实验，结果表明这种振动传感器可以实现高频振动信号的检测，实际上限频率达6kHz，测量频率误差小于0．5％，能够实现温度补偿，且集成度高，结构轻便，具有广阔的实用前景。

英文摘要：

A novel high frequency vibration sensor based on steel equi-intensity cantilever beam, using fiber Bragg grating as sensing dement,was proposed. The sensor was realized with FBG fixed on the side of the beam. The resonance frequency and characteristic of strain of the beam was analyzed with material mechanics. The optical signal was demodulated based on the matching gratings filter method. With the majorization design, the sensor achieved the function of temperature compensation. Through the tests experiment toward vibration with random frequency in different environment,the result shows the sensor can measure the vibration signal accurately in the range of 100 Hz-6 kHz,and the frequency error is below 0. 5%.