中文摘要：

针对现有MEMS万向惯性开关不具备识别冲击载荷方位的问题,提出了可识别载荷方位区间的MEMS万向惯性开关.该开关主要由惯性质量块,四个独立的径向电极和一个轴向电极组成.通过采用特殊形状的惯性质量块以及在空间上合理布置四个相互独立的径向电极和一个轴向电极,开关可以依靠不同的电极闭合状态达到识别载荷方位区间的目的.仿真结果表明,所设计的万向惯性开关能够有效识别加速度载荷的空间方位且具有良好的抗过载性能.

英文摘要：

In order to solve the problem of lack of ability to identify the azimuth interval of impact load, a MEMS inertial switch was designed to distinguish interval azimuth of load. The switch was mainly composed of inertial mass,four radial electrodes and an axial electrode. With four separate radial electrodes and an axial elec-trode arranged around the inertial mass the switch could distinguish azimuth interval of impact load by detecting contact state of electrodes. The simulation results indicated that the switch could effectively identify the azimuth interval of impact load in the space and had a good anti-overload performance.