中文摘要：

针对现有惯性开关阈值单一导致应用范围受限的问题,设计了平面万向双阈值MEMS惯性开关。该开关由弹簧质量块和两组弹性电极构成,采用周边弹簧支撑中心环形质量块的形式,低阈值弹性电极布置在环形质量块外部,高阈值弹性电极布置在环形质量块内部,两级阈值分别为450 g和900 g。仿真分析表明,方向差异引起的低阈值散布范围为-12%--5%,高阈值散布范围为-23%--12%;在幅值450 g、脉宽1ms载荷下敏感平面内最短接触时间70μs,在幅值900 g、脉宽1ms载荷下敏感平面内最短接触时间15μs。

英文摘要：

In the view of limited application of the single threshold inertia switch,a double threshold inertia switch composed by spring-mass system and two group flexible electrodes was designed.The center annular mass suspended by four S-shape springs was used as movable electrode and the flexible electrode serve as fixed electrode.The flexible electrodes of the lower threshold were disposed outside the annular mass while the high threshold electrodes inside the annular mass.Simulation results showed that dispersion of the low threshold in different directions was-12%--5% and the high threshold was-23%--12%;minimum contact time in the sensitive plane was 70 us under 450g-1 ms pulse load and the minimum contact time was 15 us under 900g-1 ms pulse load.