中文摘要：

将共振隧穿二极管具有的介观压阻效应与哥氏效应结合应用于陀螺的设计中,提出了一种新型的采用回折型正交梁的陀螺结构。结合现在的工艺水平,设计了合理的加工工艺方案,并进行了加工与封装。通过对封装后的陀螺进行驱动方向测试,得到了固有频率的范围;检测方向上利用振动台对陀螺灵敏度进行了测试,得到在1kHz和4kHz时的测试灵敏度分别为7.51mV/gn、100.74mV/gn。

英文摘要：

The mesopiezoresistive effect of Resonant Tunneling Diodes（RTD） and Coriollis effect are both used in the design of gyroscope,and a novel gyroscope structure with orthogonal beam is proposed.The feasible fabrication process is designed according to present process technology,and the gyroscope is fabricated and packaged.The range of gyroscope natural frequency is gained by the driven direction testing of fabricated gyroscope.The sensitivity of gyroscope is tested in detection direction by using the vibration table.In the case of 1 kHz and 4 kHz,the testing sensitivity of gyroscope is 7.51 mV/gn,100.74 mV/gn,respectively.