中文摘要：

提出了一种高精度、低量程隧道陀螺仪的新结构,分析了其结构及工作原理;对陀螺进行了必要的仿真,仿真结果与理论推导相接近,这样就实现了隧道效应传感器的高灵敏度与哥氏力测量角速度原理的结合。采用体硅工艺设计了陀螺仪版图,并对其进行流片加工。加工完成后,采用HP4156C高精度半导体参数测试仪对传感器的隧道电流效应进行了测试,并验证了其测试结果;同时,对结构进行失效分析。

英文摘要：

A new structure of tunneling gyroscope with high-accuracy and low-range was presented in this paper.The structure and the operating principle of the gyroscope have been analyzed.The necessary simulation of this gyroscope has been carried out and the simulation results were similar to the theoretical calculation results.This design has combined the high sensitivity of the tunneling effect sensor with the Coriolis principle.The gyroscope pattern has been designed using the silicon bulk micromachining and has been processed by the tape-out.After processing,its tunneling effect was tested by HP4156C high precise semiconductor parameter test instrumentation and the results was validated.Then the disabled form of the structure was analyzed.