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中文摘要：
提出了一种新颖的基于纳米薄膜共振隧穿结构（RTS）的微陀螺。对共振隧穿结构的介观压阻效应进行了理论分析；设计了RTS的结构和工艺方法；制备出了能反映共振隧穿效应的RTS结构。该结构降低了器件的寄生电容，改善了敏感薄膜的负阻特性，适用于共振隧穿效应陀螺。对共振隧穿效应陀螺进行了结构设计和理论仿真；利用体工艺制造了微陀螺；对陀螺的关键性能参数进行了测试。
英文摘要：
The resonant tunneling structure （RTS） micro gyroscope based on nano-film was proposed. The meso-piezoresistive effect of RTS was analyzed; the material structures of RTS and its processing methods were designed; the RTS that can reflect the resonant tunneling effect was fabricated. The structure can reduce the parasitic capacitance of the sensor, improve the negative resistance characteristics of the sensitive film, and be used in micro gyroscope. The structural design and simulation of micro gyroscope based on resonant tunneling effect were carried out; the micro gyroscope was manufactured using bulk micromachining technology, and its key performance parameters were tested.
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