中文摘要：

提出了一种高精度低量程复合梁结构的新型隧道电流式陀螺仪，采用标准硅微加工技术进行了设计与加工，实现了隧道效应传感器的高灵敏度与哥氏力测量角速度原理的结合，从力学角度对陀螺仪的驱动梁与检测梁的力学特性进行了分析，对陀螺的基本原理进行了必要的模态和静力学仿真，仿真结果满足驱动与检测模态的要求。另外，制定了切实可行的工艺流程，阐述了加工所需要的关键工艺，重点研究了隧尖制造技术。

英文摘要：

Presents a new structure of tunnel gyroscope which is high-accuracy and low-range. And the structure is designed and manufactured by silicon micro process technology. This design combined high sensitivity of tunneling effect with coriolis principle. Besides, the basic components of the gyroscope were also analyzed in detail, and static and model analysis of ansys were made in the paper. The simulation result is close to the principle. At the same, set feasible technological processes. We also represented the key technology needed in the process of processing.