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中文摘要：
本文通过建立整体硬质合金立铣刀上制备CVD金刚石涂层时CVD沉积系统流场的三维模型,研究了进气口分布对该系统流场均匀性的影响,优化了进气口的分布;在仿真的基础上开展了整体硬质合金立铣刀上制备CVD金刚石涂层的验证实验,采用SEM和Ram an对制备的CVD金刚石涂层进行了分析测试。结果表明：优化后的流场可以用于制备高质量的CVD金刚石涂层,且批量制备出的在衬底不同位置上的铣刀表面CVD金刚石涂层的质量均匀一致。
英文摘要：
A three-dimensional finite element model of diamond coating on cemented carbide milling cutter in a CVD system was created and the gas flow field was simulated.It shows that proper distribution of inlets is a particularly important factor for obtaining a uniform gas flow field.On this basis,some CVD diamond coated cemented carbide end mills were prepared in this system as a verification.The coated milling cutters were analyzed by SEM and Raman.The results show that the selected distribution of inlets was able to meet the requirement of uniform deposition of coating,and the coatings on different milling cutters prepared in the same batch were of the same coating quality.
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