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小型化 CVD 金刚石沉积设备控制系统研究
  • 期刊名称：硅酸盐通报
  • 时间：0
  • 页码：101-104
  • 语言：中文
  • 相关项目：基于陶瓷轴承应用的NCD膜抑晶生长机理及其摩擦学性能研究
作者： 钟磊,卢文壮,王鸿祥,等|
同期刊论文项目
基于陶瓷轴承应用的NCD膜抑晶生长机理及其摩擦学性能研究
期刊论文 50 获奖 2 专利 4
同项目期刊论文
Si3N4 陶瓷轴承内圈 NCD 膜制备中的热流耦合分析
金刚石涂层的纳米压痕力学性能研究
HFCVD 系统中衬底温度场及气相空间场的数值分析
NCD/Si3N4 界面接触应力分析
Stress in Diamond Coatings on Cutting Tools Deposited by Hollow Substrate Holder
Fundamental study on diamond spherical shell film for polishing of concave spherical surface
Study on the Surface Integrity of Polished Diamond Thick Film Prepared by EACVD
纳米金刚石薄膜的微结构和残余应力
Contact Stress Analysis of NCD Coating on Cemented Carbide
EACVD 小型化系统摆动衬底设计及温度场仿真研究
Si3N4 陶瓷轴承 NCD 涂层制备中的温度场模拟
Stress in Freestanding CVD Diamond Thick Film
Simulation of Gas Flow Field in HFCVD System for CVD Diamond Growth
The Cutting Behavior of Diamond Coated Tool in Machining Al-20wt%Si Alloy
Characterization of Diamond Spherical Shell Thick Film by DC Plasma CVD
大面积自支撑 CVD 金刚石厚膜的应力研究
Study on Mechanical Polishing for CVD Diamond Films of Forming Nucleus Surface and Growing Surface
Polycrystalline columnar diamond film deposited on spherical substrate by DC arc plasma CVD
Investigation on the Machining of Thick Diamond Films by EDM Together with Mechanical Polishing
Effect of grid bias on deposition of nanocrystalline diamond films
Analysis of interlayer between WC–Co and CVD diamond film
B 掺杂 CVD 金刚石厚膜的应力研究
Effects of Methane Concentration on Diamond Spherical Shell Films Prepared by DC-Plasma Jet CVD
EACVD 金刚石膜沉积设备衬底温度的测量
Study of Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD
Investigation on Strain Film in the Thin Film Resistance Strain Gauge
Growth of High Quality Spherical Diamond Film by DC Plasma Jet CVD
H FCVD 衬底三维温度场有限元法模拟
Diamond Film Synthesis with a DC Plasma Jet:Efect of the Contacting Interface between Substrate and
整体硬质合金铣刀上制备CVD金刚石涂层的系统三维流场研究
基于模型复制法的金刚石微结构制备研究
温度对压痕法测试砷化镓显微硬度及裂纹形成和扩展的影响
等离子体稳定性对曲面金刚石膜生长的影响
硅衬底上高增透金刚石膜的制备研究
NCD／Si3N4界面接触应力分析
HFCVD衬底三维温度场有限元法模拟
栅极偏压对纳米金刚石薄膜沉积过程的影响
HFCVD系统中衬底温度场及气相空间场的数值分析
EACVD小型化系统摆动衬底设计及温度场仿真研究
EACVD摆动衬底空间流场有限元模拟研究
金刚石线锯切割对砷化镓切片表面质量的影响
Si3N4陶瓷轴承内圈NCD膜制备中的热流耦合分析