中文摘要：

介绍了波导光互连的研究现状及发展趋势。波导光互连研究主要包括波导结构的成形、微反光镜的制作、功能结构的设计以及可靠性测试,应用前景广阔,是今后几年光互连技术的研究重点之一。然而波导光互连也面临着很大的挑战：廉价材料和工艺的选择,性能与可靠性的完善,互连密度的提高与可靠性的协调,3D封装以及标准化与产业化等。

英文摘要：

Research and development of waveguide optical interconnection are described.Waveguide optical interconnection includes waveguide structure forming,process of micro-mirror structure,functional structure design and reliability test.Owning extensive application prospect,waveguide optical interconnection becomes one of the research key points for next few years.However,there still has great challenges existed,e.g.choosing of low-cost materials and processes,improvement on performance,and compromise between density-increased and reliability.The issues with 3-D packaging,industrialization and industry standardization are also need to consider further.