中文摘要：

进行了电解复合超声频振动加工微结构的基础试验，分析了微电流电解过程钝化现象，研究了超声频振动冲击波及负压空化作用消除电解钝化作用机理。分析了电解加工方式与超声频振动协调同步方法，设计和构造了微细电解复合压电式超声频振动微细加工系统。利用微细特种加工技术制作各类截面形状、尺寸的微细阴极。进行了多种材料微结构的复合加工试验，并验证了电解复合超声频振动方法实现微细加工可行性与技术优势，研究了应用该工艺进行微结构加工的工艺特性。

英文摘要：

Basic tests of ECM combined ultrasonic vibration micro-machining were carried out. The electrochemical passivation mechanism was analyzed. It is verified that anode electrolytic passivation membranes can be removed by the great blast wave and the negative pressure effect produced by ultrasonic frequency vibration. The simultaneous methods of electrochemical machining and ultrasonic vibration were analyzed. The micro-machining system that ECM combined piezoelectric ultrasonical vibration was designed and built. The micro--cathodes of different sections and sizes were manufactured by the nontraditional micro--machining. A series of micro--machining tests were carried out for manufacturing micro-- structure, such as micro-- shafts, micro-- holes, micro-- grooves and micro-- gears. The possibility and advantages of the technology had been proved. The properties of machining micro--structure were studied.