中文摘要：

为进行微器件及零件表面微结构的精微制作,提出微细超声复合电加工技术。构建、完善加工参数可较大范围调节的微细超声复合电加工系统,进行复合电加工机理研究;用组合放电微细加工方法,制作出可满足试验及实际加工要求的多种截面、尺寸的微细工具电极;进行多参数超声复合电加工试验研究,结果表明微细超声复合电加工技术具有加工效率高、精度好及成本低的技术优势。分析储油微结构对摩擦副表面摩擦学特性的影响规律,用超声复合电加工技术制作摩擦副表面储油微结构,摩擦学试验证明储油微结构可使摩擦副表面摩擦因数减小,磨损量降低。

英文摘要：

The ultrasonic combined electrical micro-machining new technology is advanced for manufacturing micro-instruments and micro-structures. The ultrasonic combined electrical micro-machining systems with machining parameters adjustable in a wide range are built and improved. The micro-machining mechanism is analyzed and discussed. Micro-tool electrodes in different sections and sizes that can meet testing and actual machining requirements are manufactured by combined electrical discharge micro-machining. Multi-parameter ultrasonic combined electrical micro-machining tests are carried out. The results show that the ultrasonic combined electrical micro-machining new technology has the advantages of high machining efficiency and accuracy and low cost. This technology is used to manufacture friction pair surface lubricant retention micro-structures. The friction tests prove that the lubricant retention micro-structures can reduce friction coefficient and wear of friction pair surfaces.