中文摘要：

分析微细电解复合超声频振动加工过程机理，提出一种微细加工新方法--超声电解复合微细加工；设计、构造并完善复合微细加工装置；研究微细阴极制作工艺，利用微细组合电加工技术制作各类截面形状的微细阴极；进行超声电解复合微细加工试验，验证微细电解复合超声频振动实现微细加工的可行性及其在加工速度、精度、表面质量等方面的技术优势，探讨超声电解复合微细加工制作微结构的工艺规律。

英文摘要：

The micro-machining mechanism and characteristics of ECM （electrochemical machining） combined ultrasonic vibrating are analyzed. A new micro-machining technology——ECM combined ultrasonic vibrating micromachining process is advanced. The micro-machining system is designed and built. Micro-cathodes manufacturing technology is studied. The cathodes that have different section shapes are made by electro-discharge micro-machining. A series of micro-machining tests are carried out for manufacturing micro-instruments, The feasibility and the advantages of the technology are proved. The micro-instruments with good machining precision, productivity and surface quality are manufactured. The process characteristics of the combined micro-machining are discussed.