为了研究大气压下气体介质阻挡放电的微观机理,利用Maya2000-pro光谱仪采集了气体介质阻挡放电的发射光谱,分析了介质阻挡放电型低温等离子体反应器的放电参数、气体体积流量和气体组分时发射光谱强度的作用规律,并依据气体放电发射光谱研究了放电空间的活性物质和氮气氩气混合气的放电机理.结果表明:大气压下氮气放电会产生第2正带系的跃迁辐射光谱;氮气放电的特征谱线强度随激励电压峰峰值与放电频率的升高而增大;氮气放电的激发态物质种类不随放电参数的改变而改变;在放电功率不变的情况下,特征谱线强度随气体体积流量变化不明显;氮气氩气混合气放电时,观察到明显的潘宁效应,且气体放电的击穿电压峰峰值随混合气中氩气体积分数的升高而下降.
The spectrum intensity of dielectric barrier discharge was determined by Maya2000-pro spec-trometer to investigate the discharge micromechanism under atmosphere pressure. The effects of discharge parameters, volume flow rate and gas composition on spectrum intensity were discussed. The active sub-stance and discharge mechanism were investigated according to emission spectrum. The experimental re-sults show that the transition radiation spectrum of second positive system is produced by nitrogen dis-charge. The spectrum intensity of nitrogen discharge is increased with the increasing of discharge peak-peak voltage and discharge frequency. The generated species of nitrogen discharge are not affected by dis-charge parameter. The volume flow rate has slight effect on characteristic spectrum intensity for constant discharge power. Penning effect and decreased peak-peak voltage are observed when argon is added into the gas mixture.