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Strain Relaxation in Ultrathin SGOI Substrates Fabricated by Multistep Ge Condensation Method
  • ISSN号：0013-4651
  • 期刊名称：Journal of the Electrochemical Society
  • 时间：0
  • 页码：H115-H118
  • 语言：英文
  • 相关项目：SOI基高速、窄谱带响应长波长Ge光电探测器研究
作者： Li, Cheng|Cai, Kunhuang|Zhang, Yong|Chen, Songyan|Kang, Junyong|Lai, Hongkai|
同期刊论文项目
SOI基高速、窄谱带响应长波长Ge光电探测器研究
期刊论文 33 会议论文 3 专利 1
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