中文摘要：

做氮的钻石电影被 EA-CVD 综合了(电子帮助化学蒸汽免职) 技术。质量和钻石电影的氮杂质状态被 SEM 描绘，分别地击打光谱学， XPS 和 EPR 光谱学。形态学从明确的方面改变到像花椰菜的结构，非结晶的碳增加的内容和质量的结果表演与增加氮流动率落下。在这些电影，而且，氮杂质存在，这能被观察 in the forms of N ⁰,[N-V ]⁰ 并且[N-V ]⁻¹ 。内容[N-V ]⁰ 并且[N-V ] 当氮流动率相对高时， ⁻¹ 更低，并且 N ⁰ 的集中从 15 ppm 变化到 483 ppm。

英文摘要：

Nitrogen-doped diamond films have been synthesized by EA-CVD （electron assisted chemical vapor deposition） technique. The quality and nitrogen impurity states of the diamond films are characterized by SEM, raman spectroscopy, XPS and EPR speclroscopy, respectively. The results show that the morphology changes from well-defined facets to cauliflower-like structures, the content of amorphous carbon increases and the quality drops with increasing the nitrogen flow rate. Furthermore, in the films, it can be observed that nitrogen impurity exists in the forms ofNs^0, [N-V]^0 and [N-V]^1. The contents of [N-V]^0 and [N-V]^-1 are lower when the nitrogen flow rate is relatively high, and the concentration of Ns^0 varies from 15 ppm to 483 ppm.