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Design of CMP slurry in CMP SiC crystal substrate (0001) Si surfacebased on alumina (Al2O3) abrasive
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：2013.3.3
  • 页码：90-93
  • 相关项目：耦合能量超精密加工SiC单晶基片的机理与工艺研究
作者： Su Jianxiu,Zhang Zhuqing,Liu Xinglong|
同期刊论文项目
耦合能量超精密加工SiC单晶基片的机理与工艺研究
期刊论文 17 专利 3
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