制作了以并五苯为半导体有源层材料的有机薄膜晶体管。用热氧化的方法制备了一层230nm的二氧化硅栅绝缘层并用原子力显微镜(AFM)分析了表面形貌。研究了器件的电学性能,得到的并五苯有机薄膜晶体管器件载流子迁移率为8.9×10^-3cm^2/v·s,器件的阈值电压和开关电流比分别为-8.2V和1.0×10^4。
Organic thin films transistor (OTFT) based on pentacene semiconductor material is made. A230 nm SiOzlayer was prepared by thermal growth method and studied by AFM. Electrical parameters such as carrier mobility and on/off ratio by field effect measurement have been investigated. For this OTFT based on pentacene material, field-effect mobility of 8.9×10^-3 cm^2/V·s and threshold voltage of -8.2 V, as well as on/off ratio of 1.0×10^4 have been obtained.