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Modulation of optical and electrical properties of sputtering-derived amorphous InGaZnO thin films b
  • ISSN号：0925-8388
  • 期刊名称：Journal of Alloys and Compounds
  • 时间：2014.12.5
  • 页码：636-642
  • 相关项目：HfTiON/TaON叠层高k栅介质薄膜的制备及其在锗场效应晶体管中的应用探索
作者： X.F. Chen|G. He|M. Liu|J.W. Zhang|B. Deng|P.H. Wang|M. Zhang|J.G. Lv|Z.Q. Sun|
同期刊论文项目
HfTiON/TaON叠层高k栅介质薄膜的制备及其在锗场效应晶体管中的应用探索
期刊论文 10
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