中文摘要：

针对神经内海马区谷氨酸化学递质与神经电生理信号的并行双模检测需要，设计了8通道电化学递质与电生理双模并行检测传感芯片微系统，系统组件包括:基于SOI(Silicon-on-insulator)工艺衬底制备的微机电系统MEMS(Micro-electro-mechanicalsystem)神经信息检测探针、低噪声颅内神经电小信号放大器、低功耗中速SAR(Successiveapproximationregister)-ADC(Analog/DigitalConverter)模/数转换器、精简低能耗OOK(On-Off-Keying)/FSK(Frequency-Shift-Keying)调制射频发射器。本微型神经信息传感芯片系统具有体积小、抗干扰、化学递质与电生理信号并行检测、灵敏性好、线性度髙等特点。对电生理裸探针的4个电生理位点表面沉积祐黑，电极阻抗优化为35.0k赘;通过酶固定技术在谷氨酸检测位点上纳米定向修饰酶复膜结构(Pt-mPD-GluOx)以形成具有特异选择性的生物识别点，实现神经化学递质谷氨酸的检测；在6~35滋mo^L谷氨酸浓度范围内线性度是0.97,单位面积灵敏度是0.0069pA/(滋mo^L)，电流响应误差<3.0pA，表明此探针可以实现特异选择功能。同时，基于数模混合180nm的ASIC(Applicationspecificintegratedcircuit)芯片制造工艺（SmicRF180nmlPoly6M)制造的神经电生理传感后端信息调理单芯片，其内部关键测试指标:微弱小信号低噪系电压放大器（等效输人噪声电压臆0.7滋Vrms，增益>70dB，电源/共模抑制比>100dB等）、SAR-ADC(有效量化位数是12bits，功耗1.2mW，最大转换速率1Msps，信噪比为60.9dB)、ASK/FSK调制的射频发射器（功放PA4~5dBm，输出功率满足10m辐射距离）。此微型神经信息感知处理芯片集成检测系统，可为海马区神经通路的研究提供便携、普适性的无线可穿戴设备。

英文摘要：

A8-channel neural signal's simultaneous transducer detection micro system was developed toresearch the neural loop located at the brain hippocampus zone.The components of the system contained theneural probe manufactured with the Micro-electro-mechanical-systems(MEMS)technique based on silicon-oninsulator(SOI)substrate,biological low noise chopper-stabilization amplifier,low noise and intermediatespeed SAR-ADC converter,reduced and low power ASK/FSK modulation radio transmitter.The micro systemwas applicable with the characters of small volume,interferences free,neural electrophysiology andneurotransmitter simultaneous detection,high sensitivity,high linearity,etc.The electrode resistance wasoptimized to35.0k赘after depositing nanometer platinum black on the4electrophysiological sites on the Ptelectrode.With the modification enzyme technique,nanomaterial enzyme membrane(Pt-mPD-GluOx)was directly fixed on the glutamate detection locus for selectively detecting special neural neurotransmitter matter.In addition,the electrochemistry measurement results indicated that the linear range of glutamate was6-35滋mol/L with correlation coefficient of0.97,the sensitivity was0.0069pA/(滋mol/L).The currentresponse error was less than3.0pA,which showed that the neural needle satisfied differential selection.Also,the logic/analog mixed signal180-nm Application specific integrated circuit(ASIC)technique(SmicRF180nm1Poly6M)was used to manufacture the transducer back-end disposing IC chip,and the testresults provided some key parameters such as chopper-stabilization amplifier(equivalent in putting noisevoltage臆0.7滋V rms@1kHz,gain of71-82dB,CMRR/PSRR>100dB),SAR-ADC(ENOB is12bits,power consumption is1.2mW when maxmium conversion speed is1Msps,signal-noise-ratio is60.9dB,e tc),and ASK/FSK modulation radio transmitter(the PArs outputting power of4-5dBm,the radiation rangeof10meters).The micro neural transducer integrated system was convenient and wireless wearable for theresearch of brain hippocampus region.