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temperature effects on the growth and electrical properties of Er2O3 films on Ge substrates
  • 期刊名称：Thin solid Films
  • 时间：0
  • 页码：164-168
  • 语言：英文
  • 相关项目：在硅衬底上Er2O3、Tm2O3高k介质材料的外延生长和物理特性研究
作者： Z.M. Jiang|T.X. Nie|J. Cui|Z.Y. Zhong|Z.B. Fang|X.J. Yang|Y.L. Fan|T. Ji|
同期刊论文项目
在硅衬底上Er2O3、Tm2O3高k介质材料的外延生长和物理特性研究
期刊论文 9 会议论文 9
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